Lam Research 16-LINE IGS GAS BOX 571-033051-002 571-033051-13589D1

Overview

These part numbers belong to the 571-033051 series, widely referenced as a 16-line IGS (Integrated Gas System) Gas Box used in Lam plasma etch/ash tools.

The gas box is a high-precision gas distribution and safety module that manages process gases before they enter the reaction chamber.

What the 571-033051 Series Is

Listings for similar parts (e.g., 571-033051-003) confirm the function and configuration:

• Identified as a 16-line IGS Gas Box
• Used in etcher / asher systems
• Handles reactive gases such as:
  • Argon
  • SF₆ (sulfur hexafluoride)
  • Chlorine
  • Nitrogen
• Designed for plasma processing environments.

Typical specs from the series:

• Plasma process pressure range: 0.06–0.2 mbar
• Chamber pressure: 0.033–0.1 mbar
• Etch capability: metals, plastics, alumina
• Includes RF-based plasma gas delivery control.

What the Gas Box Does in a Lam Tool

In Lam etch systems, the IGS Gas Box is a critical sub-assembly responsible for:

1) Gas routing & mixing

• Distributes multiple process gases through mass flow controllers (MFCs)
• Maintains precise gas ratios for plasma chemistry.

2) Safety & compliance

• Integrated:
  • Pneumatic solenoid banks
  • Pressure transducers
  • Filters and regulators
• Designed for toxic / corrosive gas handling.

3) Process stability

• Ensures repeatable flow stability → critical for wafer yield.

Typical internal components seen in listings:

• Veriflo 2-port & 3-port valves
• MFCs and filters
• Solenoid valve banks
• Sensors and control PCBs.

Meaning of the Two Part Numbers

Lam spare parts often have base assembly + configuration / revision numbers:

So they usually refer to:

• Same core assembly
• Different revision / configuration / installed option set

Typical Equipment Compatibility

These gas boxes are commonly used in Lam platforms such as:

• TCP / Kiyo / Exelan etchers
• Oxide / metal / dielectric plasma etch tools
• RIE and ashing systems

(Exact compatibility depends on the BOM code like 13589D1.)

Summary

Lam Research 571-033051-002 / 13589D1 =

• 16-line Integrated Gas System (IGS) Gas Box
• Subsystem for semiconductor plasma etchers
• Controls, mixes, and safely delivers process gases
• Critical for plasma stability and wafer process repeatability.

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