Lam Research 853-260130-200 853-A64996-002
Lam Research Semiconductor Equipment Spare Parts Overview
Product Summary
Lam Research 853-260130-200 and 853-A64996-002 are OEM spare parts used in Lam Research wafer fabrication equipment. These components are typically installed in plasma etch, deposition, strip, or clean platforms to ensure stable process performance, RF delivery, and system reliability.
Lam Research equipment supports advanced semiconductor manufacturing processes such as etch, deposition, wet clean, strip, and plating for logic, memory, and advanced packaging applications.
Key Functions
These part numbers are commonly associated with electrical/RF or control assemblies used inside Lam process modules. Their typical roles include:
- Supporting RF power delivery and plasma control
- Ensuring stable tool communication and signal integrity
- Maintaining process repeatability and equipment uptime
- Serving as replacement modules for preventive maintenance
Such assemblies are critical to keep semiconductor tools running within OEM specifications and avoid production downtime.
Typical Equipment Compatibility
These parts are used across multiple Lam Research platforms, including:
- Plasma etch systems
- Dielectric / conductor etch tools
- Photoresist strip & clean tools
- Deposition and advanced packaging equipment
They are often found in platforms such as:
- Lam 2300 series
- Lam Rainbow / Exelan platforms
- Lam Kiyo / Flex / Versys families
Applications in Semiconductor Manufacturing
Lam Research tools are widely used in:
- Logic and foundry manufacturing
- NAND and DRAM memory production
- Advanced packaging and interconnect processing
- Power devices and analog IC fabrication
These spare parts help ensure process stability, yield improvement, and tool lifecycle extension.
Key Benefits
- OEM-grade compatibility with Lam equipment
- High reliability for critical process modules
- Supports preventive maintenance programs
- Helps reduce unexpected downtime
- Extends tool service life
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ABB 5SHY series hot selling//large inventory//brand new//affordable price
First hand source, affordable price. Spot inventory!
•Shipping Port: Xiamen
•Ship to you via Fedex/DHL/TNT/UPS/EMS
•Package: Original packing with cartons
FAQ
Q:What is the earliest time when you can make delivery?
A:We will make delivery once received your payment.
Q:If the product can’t work, can it be returned?
A:We provide one year warranty.
Q:How easy is it to obtain items?
A:New are no longer continuously manufactured, and therefore supply is scarce.
However, at SAUL we specialize in sourcing hard-to-find products, and although
the lead time varies, the average is between 5-7 business days.
Q:What is the typical price for the items?
A:SAUL ELECTRIC always gives customers excellent service and prices that are highly competitive.Requirements for delivery and availability do affect pricing.
Introduction to SAUL ELECTRIC
SAUL ELECTRIC is a leading supplier specializing in industrial automation PLC modules and control systems. Committed to helping customers improve productivity, reduce downtime, and provide high-quality services and diversified projects.
Main advantages:
- Integrating multiple renowned brands: SAUL ELECTRIC integrates multiple renowned brands in the field of industrial automation, providing customers with a wide range of product choices and high-quality solutions.
- Excellent Service: SAUL ELECTRIC is committed to providing customers with excellent service, including professional technical support, fast response, and reliable delivery.
- Diversified projects: SAUL ELECTRIC has rich project experience and can provide customized solutions to meet the needs of different customers.
- Professional service team: SAUL ELECTRIC has an experienced professional team that can provide customers with the most effective solutions.
The mission of SAUL ELECTRIC is to help customers improve productivity, reduce downtime, and provide high-quality services and diversified projects. SAUL ELECTRIC is your trusted partner !
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