Lam Research ALL IN 1 GAS BOX 571-065780-703 — Overview

The Lam Research 571-065780-703 ALL-IN-1 Gas Box is a semiconductor process gas delivery assembly used in Lam plasma etch systems (especially Lam 2300 / Flex / Jetstream platforms). It integrates gas distribution, safety, and flow control into a single module installed in the tool gas cabinet.

Key Function

This module manages process gases used during plasma etching and deposition, ensuring:

• Ultra-precise gas flow control
• Safe gas isolation and purge
• Integration with tool interlocks and process recipes

Gas boxes are critical subassemblies in semiconductor fabs because process gases (CF₄, SF₆, Cl₂, BCl₃, O₂, Ar, etc.) must be delivered with extremely tight tolerances.

Main Features

Typical configuration of the 571-065780-703 Jetstream gas box includes:

1) Integrated Mass Flow Controllers (MFCs)

• Version -703 is known as the Jetstream gas box with 16 MFC channels.
• Provides multi-gas mixing and recipe flexibility.
• Usually equipped with HORIBA / MKS / STEC MFCs depending on build.

2) All-in-One Gas Panel Design

“ALL-IN-1” means the module integrates:

• Gas inlet manifolds
• Pneumatic valves
• Purge lines (N₂ / Ar)
• Pressure regulators
• Leak detection & interlocks

This reduces installation complexity and improves maintenance speed.

3) Designed for Lam Jetstream Etch Platforms

Used in:

• Lam 2300 Kiyo / Exelan / Flex series
• Plasma etch chambers requiring multi-gas capability

Documentation for Lam 300 mm V2 Flex lists the ALL IN 1 GAS BOX as a standard subsystem in the tool configuration.

Typical Technical Characteristics (industry typical)

Because Lam doesn’t publish open datasheets, specs are usually known from field service and refurbishment listings:

Differences vs Similar Part Numbers

Common variants in the same family:

***************************************************

Main Brand:

ABB      Allen-Bradley      Alstom      Bently         Emerson     Foxboro

GE       MOOG       Schneider       Woodward       HIMA        Honeywell  

ABB 5SHY series hot selling//large inventory//brand new//affordable price

First hand source, affordable price. Spot inventory!

•Shipping Port: Xiamen

•Ship to you via Fedex/DHL/TNT/UPS/EMS

•Package: Original packing with cartons

Our Main Brand

ABB, GE, Allen Bradley, Honeywell, Emerson, Bently Nevada, Prosoft, Siemens, Westinghouse, Triconex, Foxboro, ICS Triplex, Hima, Schneider, Yokogawa, Woodward, B&R, KEBA, etc

Rockwell: Allen-Bradley

1) ControlLogix 1756 series controller

2) CompactLogix 1769 series controller

3) SLC 500 1747 1746 Series Controller

4) PLC-5 1771 1785 series controller5)

5)ProSoft :MVI69/PS69/MVI56/MVI94/MVI71/MVI46/31506)

6)ICS TRIPLEX trusted system

ABB:

1) AC800M series controller I/O module

2) AC800F series controller module

3) AC31 series controller module

4) 800xA series modules

5) Bailey INFI 90 module

6) DSQC robot module spare parts

7) Advant OCS system spare parts

8) H&B Freelance

Bentley Nevada :

1) Bently 3500 Monitoring system

2) Bently 3300 Monitoring system

Schneider:

Quantum 140 series :Modicon M340

Modicon Premium :CPU Processor Module,Communication module,etc

Emerson:

1) Ovation System DCS Card

2) DeltaV system Dual Channel Redundancy Safety System, Redundancy Controller

General Electric:

1) IS200/DS200 series Excitation system card

2)IC693/IC695/IC697/IC698/IC200/IC660/IC670 CPU module,Communication module, Analog Digital module

Introduction to SAUL ELECTRIC

SAUL ELECTRIC is a leading supplier specializing in industrial automation PLC modules and control systems. Committed to helping customers improve productivity, reduce downtime, and provide high-quality services and diversified projects.

Main advantages:

1. Integrating multiple renowned brands: SAUL ELECTRIC integrates multiple renowned brands in the field of industrial automation, providing customers with a wide range of product choices and high-quality solutions.
2. Excellent Service: SAUL ELECTRIC is committed to providing customers with excellent service, including professional technical support, fast response, and reliable delivery.
3. Diversified projects: SAUL ELECTRIC has rich project experience and can provide customized solutions to meet the needs of different customers.
4. Professional service team: SAUL ELECTRIC has an experienced professional team that can provide customers with the most effective solutions.

The mission of SAUL ELECTRIC is to help customers improve productivity, reduce downtime, and provide high-quality services and diversified projects. SAUL ELECTRIC is your trusted partner !