Lam Research 839-017892-201 / 853-017892-201
These are Lam Research semiconductor equipment spare parts. Based on available industry references and Lam’s product ecosystem, this paired number format typically indicates assembly + revision/variant part numbers used inside Lam wafer fabrication systems (etch, deposition, clean, or strip platforms).
Basic identification
- Manufacturer: Lam Research
- Part numbers:
- 839-017892-201
- 853-017892-201
- Category: OEM semiconductor equipment spare parts
- Typical usage: Installed inside Lam process tools (etch / clean / deposition / strip platforms)
In Lam’s numbering logic:
- 839-xxxxx → Often refers to assembly / sub-assembly / module
- 853-xxxxx → Often refers to service replacement / upgraded or matched spare for the same assembly
So these two numbers are usually paired service parts (original assembly + replacement/service version).
Likely application inside Lam equipment
Lam Research tools are used in critical wafer fabrication steps such as:
- Plasma etch
- Wafer cleaning
- Dry resist and patterning
- Deposition and strip processes
These processes are core to advanced chip manufacturing.
Parts in the 83x / 85x series commonly belong to:
- RF or power delivery modules
- Gas / vacuum / fluid control assemblies
- Sensor or control interface boards
- Chamber hardware assemblies
- Motion / temperature / safety sub-systems
These components support high-precision process control and system uptime, which are critical in modern semiconductor fabs.
Typical equipment platforms using similar parts
These spare parts are commonly found in Lam platforms such as:
- Lam 2300 etch systems
- Lam Kiyo / Flex / Versys / Reliant platforms
- Lam Clean / Strip systems (EOS, etc.)
- 300mm wafer processing tools
Lam tools are designed to achieve high throughput, defect reduction, and process uniformity for advanced semiconductor nodes.
Why these parts are important
In semiconductor fabs, such spare parts are used for:
- Preventive maintenance (PM kits)
- Corrective maintenance (CM replacement)
- Tool uptime and yield protection
- Matching OEM performance specifications
Using the exact Lam OEM part numbers ensures:
- Compatibility with tool firmware and recipes
- Stable process repeatability
- Reduced risk of wafer scrap or downtime
Short SEO-style description (ready for website)
Lam Research 839-017892-201 / 853-017892-201 are OEM semiconductor equipment spare parts used in Lam wafer fabrication systems. These service replacement components support critical process modules, helping maintain tool stability, uptime, and process accuracy in advanced semiconductor manufacturing environments.
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•Package: Original packing with cartons
FAQ
Q:What is the earliest time when you can make delivery?
A:We will make delivery once received your payment.
Q:If the product can’t work, can it be returned?
A:We provide one year warranty.
Q:How easy is it to obtain items?
A:New are no longer continuously manufactured, and therefore supply is scarce.
However, at SAUL we specialize in sourcing hard-to-find products, and although
the lead time varies, the average is between 5-7 business days.
Q:What is the typical price for the items?
A:SAUL ELECTRIC always gives customers excellent service and prices that are highly competitive.Requirements for delivery and availability do affect pricing.
Introduction to SAUL ELECTRIC
SAUL ELECTRIC is a leading supplier specializing in industrial automation PLC modules and control systems. Committed to helping customers improve productivity, reduce downtime, and provide high-quality services and diversified projects.
Main advantages:
- Integrating multiple renowned brands: SAUL ELECTRIC integrates multiple renowned brands in the field of industrial automation, providing customers with a wide range of product choices and high-quality solutions.
- Excellent Service: SAUL ELECTRIC is committed to providing customers with excellent service, including professional technical support, fast response, and reliable delivery.
- Diversified projects: SAUL ELECTRIC has rich project experience and can provide customized solutions to meet the needs of different customers.
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The mission of SAUL ELECTRIC is to help customers improve productivity, reduce downtime, and provide high-quality services and diversified projects. SAUL ELECTRIC is your trusted partner !
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