Lam Research GAS BOX 571-065780-76178A — Overview

Product Overview

Lam Research Gas Box 571-065780-76178A is an integrated process gas delivery module used inside Lam semiconductor etch / deposition platforms (commonly 2300 series and similar process chambers).

A “Gas Box” in Lam tools is a high-precision gas distribution and safety subsystem responsible for delivering process gases to the chamber under strict flow, pressure, and safety control.

Gas boxes with similar base P/N 571-065780-xxxx are confirmed as All-in-One Gas Box assemblies used on Lam etchers.

Main Function in Semiconductor Tools

The Gas Box is part of the Gas Delivery System (GDS) and performs:

• Process gas routing and distribution
• Mass Flow Control (MFC) integration
• Pressure regulation
• Purge / vent / pump sequencing
• Leak detection and safety interlock
• Gas isolation for maintenance and chamber protection

These modules ensure stable and repeatable plasma processing, which is critical for wafer fabrication.

Typical Supported Process Gases

Based on Lam gas-box configurations for etch systems, the gas lines typically support fluorine, chlorine, and inert gases such as:

• Cl₂, BCl₃
• CF₄, CHF₃, CH₂F₂, C₂H₄
• SF₆, NF₃
• O₂, N₂, H₂
• Ar, He

These are standard gases used in plasma etching and chamber cleaning processes.

Key Components Inside the Gas Box

A typical Lam All-in-One Gas Box contains:

Gas Control Hardware

• Mass Flow Controllers (MFCs)
• Pneumatic valves / isolation valves
• Pressure transducers
• Filters and purifiers
• Gas line manifolds

Electrical & Control

• PCB control boards
• Interlock circuits
• Communication interface to tool controller

Safety Features

• Automatic shutoff valves
• Purge sequences (N₂)
• Leak detection routing
• Exhaust integration

Typical Applications

Used in Lam platforms for:

• Plasma Etch (Dielectric / Conductor / Poly)
• Chamber Clean (NF3 remote plasma clean)
• PECVD / CVD gas delivery
• Advanced packaging and memory fabrication

Lam process tools support a wide range of semiconductor applications such as advanced packaging, memory, and transistor fabrication.

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