Lam Research GAS BOX 571-065780-76178B — Overview
The part you asked about is a Lam Research Jetstream / All-in-One Gas Box assembly used inside semiconductor etch / ash equipment. The suffix 76178B is typically a configuration or revision code for a specific tool setup (often tied to chamber option, gas line configuration, or factory integration kit).
What this Gas Box is
The 571-065780 series is a process gas delivery & distribution module used in Lam etch systems.
In Lam tools, the gas box is the central gas panel that:
- Receives process gases from facility supply
- Regulates pressure and flow
- Distributes gases to the process chamber safely and precisely
These gas boxes are commonly used in:
- Lam TCP / Kiyo / Exelan / Flex / 2300 series etchers
- Plasma etch & photoresist ashing processes
Gas delivery systems like this are essential because semiconductor plasma processes require precise gas mixing, flow control, and safety interlocks.
Typical configuration of the 571-065780 family
Based on listings and teardown descriptions of nearby part numbers (702 / 703 etc.), this gas box typically includes:
Core modules inside the gas box
- Multiple Mass Flow Controllers (MFCs)
- Pneumatic & proportional control valves
- Gas mixing manifold
- Pressure regulators
- Filters and purge lines
- Safety interlocks and leak detection ports
- Exhaust routing
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