Lam Research 839-800327-438 Overview
Part Number: 839-800327-438
Manufacturer: Lam Research
Category: Electrostatic Chuck (ESC) – 300mm wafer
Typical Tool Platform: Lam etch / deposition platforms (ex: FLEX, TCP, etc.)
Product Description
The Lam Research 839-800327-438 is a 300mm Electrostatic Chuck (ESC) designed to securely hold semiconductor wafers during plasma processing. ESCs are critical components inside process chambers, ensuring wafer stability, thermal control, and process uniformity during etching or deposition.
Some listings also describe it as a FLEX DX (CORE) ESC Chuck, confirming use in Lam’s FLEX platform process chambers.
Key Functions of the ESC Chuck
1) Wafer Clamping
The electrostatic chuck uses electrostatic force to clamp a 300mm wafer firmly to the chuck surface.
This ensures:
- Precise positioning
- Reduced wafer movement
- Improved process repeatability
2) Thermal Control
ESCs regulate wafer temperature through:
- Embedded heaters
- Helium backside cooling channels
This thermal stability is essential for:
- Uniform etch rates
- Consistent film deposition
3) Plasma Process Stability
During plasma etching or deposition, the ESC:
- Provides electrical isolation
- Maintains uniform RF coupling
- Supports high-precision semiconductor fabrication
Typical Applications
The 839-800327-438 ESC is commonly used in:
- Plasma etch systems
- Dielectric etching
- Metal etching
- Advanced node semiconductor manufacturing
- 300mm wafer fabs
Technical Characteristics (Typical)
| Feature | Description |
|---|---|
| Wafer Size | 300mm |
| Type | Electrostatic Chuck (ESC) |
| Sensors | Often includes temperature sensors |
| Cooling | Helium backside cooling |
| Platform | Lam FLEX / etch platforms |
| Installation | Process chamber internal component |
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•Shipping Port: Xiamen
•Ship to you via Fedex/DHL/TNT/UPS/EMS
•Package: Original packing with cartons
FAQ
Q:What is the earliest time when you can make delivery?
A:We will make delivery once received your payment.
Q:If the product can’t work, can it be returned?
A:We provide one year warranty.
Q:How easy is it to obtain items?
A:New are no longer continuously manufactured, and therefore supply is scarce.
However, at SAUL we specialize in sourcing hard-to-find products, and although
the lead time varies, the average is between 5-7 business days.
Q:What is the typical price for the items?
A:SAUL ELECTRIC always gives customers excellent service and prices that are highly competitive.Requirements for delivery and availability do affect pricing.
Introduction to SAUL ELECTRIC
SAUL ELECTRIC is a leading supplier specializing in industrial automation PLC modules and control systems. Committed to helping customers improve productivity, reduce downtime, and provide high-quality services and diversified projects.
Main advantages:
- Integrating multiple renowned brands: SAUL ELECTRIC integrates multiple renowned brands in the field of industrial automation, providing customers with a wide range of product choices and high-quality solutions.
- Excellent Service: SAUL ELECTRIC is committed to providing customers with excellent service, including professional technical support, fast response, and reliable delivery.
- Diversified projects: SAUL ELECTRIC has rich project experience and can provide customized solutions to meet the needs of different customers.
- Professional service team: SAUL ELECTRIC has an experienced professional team that can provide customers with the most effective solutions.
The mission of SAUL ELECTRIC is to help customers improve productivity, reduce downtime, and provide high-quality services and diversified projects. SAUL ELECTRIC is your trusted partner !
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