Lam Research 810-068158-015 — Overview

Lam Research 810-068158-015 is a semiconductor equipment interface/control board used in Lam etch and vacuum process platforms. It is typically categorized as a rocker valve / vacuum valve interface or communication module, designed to connect motion/valve subsystems with the main tool controller to ensure reliable process automation.

Basic Identification

• Manufacturer: Lam Research
• Part number: 810-068158-015
• Category: Interface board / valve control & communication module
• Country of origin: USA

Core Function

The module acts as a communication and control bridge inside semiconductor fabrication tools:

• Connects etch robot / valve subsystems with the central control system
• Enables real-time command and feedback communication
• Ensures stable and continuous operation of automated wafer processing equipment

It is typically used in Lam etch, CVD, and vacuum chamber platforms where precise valve control is critical to process stability.

Key Technical Characteristics

(compiled from multiple industrial distributor specs)

Electrical & Environmental

• Power supply: 3.3 VDC
• Operating temperature: –40°C to +85°C
• Operating humidity: 0–95% RH

Communication & Interfaces

• Interfaces: RS-232 + Ethernet
• Communication speed: up to 100 Mbps
• Supports industrial protocols (e.g., Modbus variants)

Mechanical

• Approx size: 500 × 300 × 200 mm
• Approx weight: ~4–10 kg (depends on configuration)

Role Inside Lam Semiconductor Tools

This board belongs to the vacuum/valve control series. Compared with the 810-068158-014 model:

• 015 version is considered an upgraded variant
• Provides more control channels and redundant communication
• Designed for large multi-chamber tools and higher automation demands

Typical responsibilities inside a tool:

• Valve actuation coordination
• Process communication between subsystems
• Monitoring and feedback of mechanical components
• Ensuring vacuum stability and process repeatability

Typical Applications

Used in industries requiring high-precision plasma or vacuum processing:

• Semiconductor wafer fabrication
• Photovoltaic manufacturing
• Electronics and micro-device production

Summary

Lam Research 810-068158-015 is a critical control/interface PCB used in advanced semiconductor processing equipment. Its main value lies in reliable communication, valve control, and automation integration, making it essential for maintaining process stability and uptime in Lam etch and deposition systems.

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